well you cleaned the EGR valve and the MAF, but did you really do a good job, it make it idle bettery, but still rough????/ did you know that a car that is running smooth and you take off the vacuum hose to the EGR and then pull a vacuum on the EGR that it will idle rough and then kill???
this might be your problem you cleaned off the EGR, but it cleared up some of the rough idle, but it still might need more cleaning or even a new EGR??? try cleaning it again and this time pull a vacuum though it a few time to get the valve to open and close while off the car and the cleaning agent running though the dirty/carbonized valve...maybe this is all that is needed????