If you have an open filter, it would probably be a good idea to cover it with a pastic bag or something (I don't)... I just take the power washer, spray liberaly into the engine back to get off any dust or anything (avoid direct spray to the coil pack, Intake ETC..) then I take the brush and mop down the manifold. Spray everything again.. take a towel and dry everything off. You can use engine degreaser to get the REALLY BAD areas (highly adivsed) after that take some silcone tire spray (I use maguiars) and liberaly spray everything down, let it sit for a minute, wipe up any excess.... results, gorgeous.
Hope that helps
Kev