IPA (Isopropyl Alcohol) should work fine for the MAF elements. Surprised I hadn't thought of it myself. However, there are two problems with IPA that have minimized its use as an electronics cleaner.
1) It is a Volital (sp) Organic Compound and VOCs are naughty (or so say the environmental engineers). There are VOC free cleaners on the market now that clean as well as IPA and the "tree hugger" and ISO-14000 types love them.
2) IPA can react with some "no clean" fluxes (especially no clean RMAs used in solder reflow) and leave a residue. Of course, the flux used in the wave solder machines at Ford (not a process used on the MAF) is Alpha Metal's PF2, which is just 98% isopropyl alcohol and 2% adipic acid. Depends on the flux.