The MAF and MAF sensor should remain pretty clean. I had my MAF out for the first time at 80K miles and there was no visible dirt or grime and it was working just fine. I was doing some intake work and cleaned the sensor element with a quick spray of electronic parts cleaner as you mentioned. It's still working fine today and remains very clean when ever I check it during routine air filter changes/cleaning. I rarely clean it, and have not had any MAF problems. Long story short: A quick spray won't hurt it, chances are it rarely will ever need to be cleaned. (Just don't scrub it with a wire brush
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