If you do clean your MAF, make sure it's with either an electronic parts cleaner or throttle body cleaner. The other cleaners are too caustic to be used on those sensitive wires!
My own thought, though, would be to run this stuff called RXP (it's in a little red bottle at Autozone in the additive section) through your car after you clean out the throttle body and MAF. I was having difficulties myself with my 00' SVT starting up here early in the a.m., and doing the above mentioned items helped dramatically as well as improving throttle response and power.
Just my .02$