I've been meaning to write this for a while. I've been worried be other member's techniques. Here ya go...
It only costs a few dollars in parts. You need a couple of SOFT pipe cleaners and either a can of NO RESIDUE Electrical Contact Cleaner or a bottle of 99% Isopropyl Alcohol.
Don't buy anything less than 99% Isopropyl! Anything less than 99% contains rubbing oils and will screw up the MAF's readings.
The pipe cleaners should be the super soft kind like kids use for arts and crafts. like these:

You then douse the pipe cleaner in cleaning fluid. Very carefully brush the pipe cleaner against the MAF elements. Don't use any force! The MAF wires are extremely delicate and are easy to break.
Like so:

Another view:

Once you're finished blow on it real hard to get rid of any fibers left behind by the pipe cleaners. You should also reset your PCM so that it learns the clean MAF's characteristics.
BTW, I've been an Electronics Technician for over 10 years, so I know what I'm talking about.

HTH,
Ben