MAF cleaning....been there done that many times.
Best thing to do, take it off the car! Second thing, let it cool some. What to use? I have tried the three that have been suggested. 1) Electronics cleaner...left some film. 2)Brake cleaner..didn't have, used gumout choke cleaner....didn't fix and was not sure I was convinced that it cleaned it. 3) B-12 Chemtool....ahhhh....like it! Used it on the IAT for example and sprayed it a couple times, cleaned it right up. I think though if you suspect the O2 sensor....you have the codes to back it up, then change it first. The other things to look for would be degrading performance, sluggish acceleration...especially when cold.
But I can't recommend enuff the Chemtool...gotta thank whoever said to use it!!! Wal-Mart has it in the automotive section. Get the spray with the red tube, try not to touch the MAF sensor if you can help it. The reason is that it is SOOO delicate you can do wonderful things with calibrations if you aren't careful and yes, I was being sarcastic.
Also, don't get too crazee with the cleaner. Clean it, inspect it, let it dry! If need be, repeat this step.
L8R
Rich